Semiconductor wafer handling under vacuum / in cleanrooms

Semiconductor wafer handling with steel belts include

  • Horizontal motions by scalar robots and conveyors, and
  • Vertical motions by lifting belts

In either case steel belts are critical parts under vacuum and in cleanrooms, because

  • Steel belts do not generate outgas under vacuum
  • Limited belt elongation in room temperature
  • Limited particles and dusts
  • Steel belts are conductive and static electricity can be controlled
  • Uniform belt thickness and smoothness support accurate motions

Creep slip is an issue in precise positioning when you use belts. However, if two belts are tied to two pulleys like the picture on your right, creep slip does not occur.

For example, when the pulley is driven by the motor and rotates 90 degrees, the belt moves (pulley outside diameter x Pi x 90/360) mm.

Are you working on vertical or horizontal motions? With your rough design given to us, we will convey our idea on belts to you.

Please feel free to contact us. 

Inside the scalar robot.
2 metal open belts are tied to pulleys.
Drive of the bigger pulley is directly transferred to the smaller pulley and rotates the robot arm.